Tohoku University Technology: High-Precision Micro-Load Measurement Device: T08-153
It is possible to expand and adjust the measurement range, and it can be manufactured in a small size and at a low cost.
Traditionally, force measurements in the micro and nano domains have been conducted using micro-electromechanical system transducers such as piezoelectric elements. Piezoelectric sensors are suitable for detecting dynamic forces but are not suitable for detecting static forces. In contrast, capacitive sensors excel in sensitivity and stability. Optical force sensors, while large and expensive in their configuration, can achieve high-sensitivity force measurements. However, conventional measuring devices face challenges such as a narrow measurement range, leading to a reduction in measurement range and a decrease in measurement accuracy. The present invention makes it possible to provide a high-precision load measurement device that can expand the measurement range. This invention includes an elongated beam member with a load portion at one end, a support member, and a displacement sensor. The load portion consists of a needle-like tip fixed to protrude vertically from the surface of one of the plate-like legs, and the displacement sensor can measure the displacement in the direction of the load portion's protrusion. Since the load portion does not undergo rotational motion relative to the object being measured, the arrangement of the displacement sensor relative to the load portion allows for a wide measurement range to be maintained. Furthermore, this invention can further expand the measurement range and allows for flexible adjustments to the measurement range, enabling more precise measurements.
- 企業：Tohoku Techno Arch Co., Ltd.
- 価格：Other
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